| Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning BK Kang, MS Kim, JG Park Ultrasonics sonochemistry 21 (4), 1496-1503, 2014 | 48 | 2014 |
| Effect of acoustic cavitation on dissolved gases and their characterization during megasonic cleaning BK Kang, MS Kim, SH Lee, H Sohn, JG Park ECS Transactions 41 (5), 101, 2011 | 19 | 2011 |
| Development of CO2 gas cluster cleaning method and its characterization H Choi, H Kim, D Yoon, JW Lee, BK Kang, MS Kim, JG Park, SB Kwon, ... Microelectronic engineering 102, 87-90, 2013 | 18 | 2013 |
| Optimization of DIO3 with megasonic cleaning of Ru capped EUVL mask for effective carbon contaminant removal SH Lee, BK Kang, MS Kim, JS Lim, JH Jeong, JG Park ECS Transactions 41 (5), 131, 2011 | 17 | 2011 |
| Investigation of oxide layer removal mechanism using reactive gases HT Kim, JS Lim, MS Kim, HJ Oh, DH Ko, GD Kim, WG Shin, JG Park Microelectronic Engineering 135, 17-22, 2015 | 10 | 2015 |
| Adhesion and removal behavior of particulate contaminants from EUV mask MS Kim, M Purushothaman, HT Kim, HJ Song, JG Park Colloids and Surfaces A 535, 83–88, 2017 | 6* | 2017 |
| Contamination Removal From UV and EUV Photomasks RP Venkatesh, MS Kim, JG Park Developments in Surface Contamination and Cleaning: Methods for Surface …, 2017 | 6 | 2017 |
| Adsorption of sodium dodecyl sulfate on cleaning of an N-polar GaN surface in an alkaline solution MS Kim, NR Paluvai, HT Kim, JG Park Materials Science and Engineering: B 222, 1-6, 2017 | 5 | 2017 |
| Characterization of Free-Standing Nano-Membranes by Using Ellipsometry S Park, C Lee, I An, MS Kim, JG Park, J Ahn Journal of the Korean Physical Society 72, 868-872, 2018 | 4 | 2018 |
| Influence of a wrinkle in terms of critical dimension variation caused by transmission nonuniformity and a particle defect on extreme ultraviolet pellicle GJ Kim, IS Kim, SG Lee, M Yeung, MS Kim, JG Park, HK Oh Journal of Micro/Nanolithography, MEMS, and MOEMS 16 (4), 041008-041008, 2017 | 4 | 2017 |
| Removal of Nano-sized Particles Using Carbon Dioxide (CO2) Gas Cluster Cleaning without Pattern Damage MS Kim, T Kim, JG Park Particulate Science and Technology 33 (5), 558-561, 2015 | 3 | 2015 |
| Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography MS Kim, BK Kang, M Ramachandran, JK Kim, BK Lee, JG Park Microelectronic engineering 114, 126-130, 2014 | 3 | 2014 |
| Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask S Lee, B Kang, M Kim, J Ahn, H Cho, H Lee, JG Park Japanese Journal of Applied Physics 51 (9R), 096503, 2012 | 3 | 2012 |
| Impact of non-uniform wrinkles for a multi-stack pellicle in EUV lithography GJ Kim, IS Kim, M Yeung, MS Kim, JG Park, HK Oh Extreme Ultraviolet (EUV) Lithography VIII 10143, 373-383, 2017 | 2 | 2017 |
| Prevention of metal contamination in sub 50 nm SC1 cleaning process HT Kim, GH Park, BJ Cho, JH Lee, MS Kim, JY Kim, JG Park ECS Transactions 69 (8), 69, 2015 | 2 | 2015 |
| Effect of particle contamination on extreme ultraviolet (EUV) mask and megasonic cleaning process for its removal MS Kim, HR Ji, IC Choi, HT Kim, SH Jang, J Lee, IS Kim, JH Kim, HK Oh, ... ECS Transactions 69 (8), 101, 2015 | 2 | 2015 |
| Acoustic cavitation behavior in isopropyl alcohol added cleaning solution BK Kang, JH Jeong, MS Kim, HS Sohn, AA Busnaina, JG Park Solid State Phenomena 195, 169-172, 2013 | 2 | 2013 |
| Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents MS Kim, M Purushothaman, HT Kim, HJ Song, YW Kim, JH Ahn, HK Oh, ... Colloids and Surfaces A: Physicochemical and Engineering Aspects 555, 72-79, 2018 | 1 | 2018 |
| Optimization of FPD cleaning system and processing by using a two-phase flow nozzle MS Kim, HR Kim, HT Kim, JG Park Korean Journal of Materials Research 24 (8), 429-433, 2014 | 1 | 2014 |
| Removal of UV cured resin using hybrid cleaning method MS Kim, BK Kang, JK Kim, BK Lee, JG Park Solid State Phenomena 195, 30-33, 2013 | 1 | 2013 |
Jin-Goo ParkProfessor of Materials Engineering, Hanyang UniversityDirección de correo verificada de hanyang.ac.kr
