Stiction in surface micromachining N Tas, T Sonnenberg, H Jansen, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 6 (4), 385, 1996
636 1996 The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control H Jansen, M de Boer, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 5 (2), 115, 1995
605 1995 Silicon micromachining M Elwenspoek, HV Jansen
Cambridge University Press, 2004
541 2004 A survey on the reactive ion etching of silicon in microtechnology H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman
Journal of micromechanics and microengineering 6 (1), 14, 1996
502 1996 Capillary filling speed of water in nanochannels NR Tas, J Haneveld, HV Jansen, M Elwenspoek, A van den Berg
Applied Physics Letters 85 (15), 3274-3276, 2004
293 2004 Silicon nitride nanosieve membrane HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ...
Nano letters 4 (2), 283-287, 2004
284 2004 Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as … HV Jansen, MJ de Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek
Journal of micromechanics and microengineering 19 (3), 033001, 2009
282 2009 The μ-flown: a novel device for measuring acoustic flows HE de Bree, P Leussink, T Korthorst, H Jansen, TSJ Lammerink, ...
Sensors and actuators A: Physical 54 (1-3), 552-557, 1996
282 1996 Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ...
Journal of microelectromechanical systems 11 (4), 385-401, 2002
275 2002 Micromachining of buried micro channels in silicon MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of microelectromechanical systems 9 (1), 94-103, 2000
259 2000 Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules H Tilmans, E Beyne, H Jansen, W De Raedt
US Patent 6,876,056, 2005
236 * 2005 Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures R Legtenberg, H Jansen, M De Boer, M Elwenspoek
Journal of the electrochemical society 142 (6), 2020, 1995
217 1995 Ta2O5 as gate dielectric material for low-voltage organic thin-film transistors C Bartic, H Jansen, A Campitelli, S Borghs
Organic electronics 3 (2), 65-72, 2002
193 2002 BSM 7: RIE lag in high aspect ratio trench etching of silicon H Jansen, M de Boer, R Wiegerink, N Tas, E Smulders, C Neagu, ...
Microelectronic Engineering 35 (1-4), 45-50, 1997
153 1997 High resolution powder blast micromachining H Wensink, JW Berenschot, HV Jansen, MC Elwenspoek
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000
139 2000 Characterization of a planar microcoil for implantable microsystems CR Neagu, HV Jansen, A Smith, JGE Gardeniers, MC Elwenspoek
Sensors and Actuators A: Physical 62 (1-3), 599-611, 1997
130 1997 Capillary filling of sub- J Haneveld, NR Tas, N Brunets, HV Jansen, M Elwenspoek
Journal of applied physics 104 (1), 014309, 2008
128 2008 The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches H Jansen, M de Boer, J Burger, R Legtenberg, M Elwenspoek
Microelectronic engineering 27 (1-4), 475-480, 1995
122 1995 Wet anisotropic etching for fluidic 1D nanochannels J Haneveld, H Jansen, E Berenschot, N Tas, M Elwenspoek
Journal of micromechanics and microengineering 13 (4), S62, 2003
120 2003 2D-confined nanochannels fabricated by conventional micromachining NR Tas, JW Berenschot, P Mela, HV Jansen, M Elwenspoek, ...
Nano Letters 2 (9), 1031-1032, 2002
115 2002 