Stiction in surface micromachining N Tas, T Sonnenberg, H Jansen, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 6 (4), 385, 1996
651 1996 The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control H Jansen, M de Boer, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 5 (2), 115, 1995
642 1995 Silicon micromachining M Elwenspoek, HV Jansen
Cambridge University Press, 2004
540 2004 A survey on the reactive ion etching of silicon in microtechnology H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman
Journal of micromechanics and microengineering 6 (1), 14, 1996
529 1996 Capillary filling speed of water in nanochannels NR Tas, J Haneveld, HV Jansen, M Elwenspoek, A van den Berg
Applied Physics Letters 85 (15), 3274-3276, 2004
300 2004 The μ-flown: a novel device for measuring acoustic flows HE de Bree, P Leussink, T Korthorst, H Jansen, TSJ Lammerink, ...
Sensors and actuators A: Physical 54 (1-3), 552-557, 1996
297 * 1996 Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ...
Journal of microelectromechanical systems 11 (4), 385-401, 2002
291 2002 Silicon nitride nanosieve membrane HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ...
Nano letters 4 (2), 283-287, 2004
290 2004 Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as … HV Jansen, MJ de Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek
Journal of micromechanics and microengineering 19 (3), 033001, 2009
289 2009 Micromachining of buried micro channels in silicon MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of microelectromechanical systems 9 (1), 94-103, 2000
265 2000 Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules H Tilmans, E Beyne, H Jansen, W De Raedt
US Patent 6,876,056, 2005
239 * 2005 Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures R Legtenberg, H Jansen, M De Boer, M Elwenspoek
Journal of the electrochemical society 142 (6), 2020, 1995
226 1995 Ta2O5 as gate dielectric material for low-voltage organic thin-film transistors C Bartic, H Jansen, A Campitelli, S Borghs
Organic electronics 3 (2), 65-72, 2002
196 2002 BSM 7: RIE lag in high aspect ratio trench etching of silicon H Jansen, M de Boer, R Wiegerink, N Tas, E Smulders, C Neagu, ...
Microelectronic Engineering 35 (1-4), 45-50, 1997
157 1997 Capillary filling of sub- J Haneveld, NR Tas, N Brunets, HV Jansen, M Elwenspoek
Journal of applied physics 104 (1), 014309, 2008
146 2008 High resolution powder blast micromachining H Wensink, JW Berenschot, HV Jansen, MC Elwenspoek
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000
146 2000 Characterization of a planar microcoil for implantable microsystems CR Neagu, HV Jansen, A Smith, JGE Gardeniers, MC Elwenspoek
Sensors and Actuators A: Physical 62 (1-3), 599-611, 1997
138 1997 The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches H Jansen, M de Boer, J Burger, R Legtenberg, M Elwenspoek
Microelectronic engineering 27 (1-4), 475-480, 1995
128 1995 Wet anisotropic etching for fluidic 1D nanochannels J Haneveld, H Jansen, E Berenschot, N Tas, M Elwenspoek
Journal of micromechanics and microengineering 13 (4), S62, 2003
121 2003 2D-confined nanochannels fabricated by conventional micromachining NR Tas, JW Berenschot, P Mela, HV Jansen, M Elwenspoek, ...
Nano Letters 2 (9), 1031-1032, 2002
118 2002 