Silicon micromachined hollow microneedles for transdermal liquid transport HJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ... Journal of Microelectromechanical systems 12 (6), 855-862, 2003 | 485 | 2003 |
Silicon nitride nanosieve membrane HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ... Nano letters 4 (2), 283-287, 2004 | 290 | 2004 |
Micromachining of buried micro channels in silicon MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ... Journal of microelectromechanical systems 9 (1), 94-103, 2000 | 265 | 2000 |
Microneedle structure and production method therefor Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers US Patent 6,533,949, 2003 | 259 | 2003 |
Capillarity induced negative pressure of water plugs in nanochannels NR Tas, P Mela, T Kramer, JW Berenschot, A van den Berg Nano letters 3 (11), 1537-1540, 2003 | 225 | 2003 |
Resistless patterning of sub-micron structures by evaporation through nanostencils J Brugger, JW Berenschot, S Kuiper, W Nijdam, B Otter, M Elwenspoek Microelectronic engineering 53 (1-4), 403-405, 2000 | 183 | 2000 |
High resolution powder blast micromachining H Wensink, JW Berenschot, HV Jansen, MC Elwenspoek Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000 | 146 | 2000 |
A micromachined pressure/flow-sensor RE Oosterbroek, TSJ Lammerink, JW Berenschot, GJM Krijnen, ... Sensors and Actuators A: Physical 77 (3), 167-177, 1999 | 130 | 1999 |
Wet anisotropic etching for fluidic 1D nanochannels J Haneveld, H Jansen, E Berenschot, N Tas, M Elwenspoek Journal of micromechanics and microengineering 13 (4), S62, 2003 | 121 | 2003 |
2D-confined nanochannels fabricated by conventional micromachining NR Tas, JW Berenschot, P Mela, HV Jansen, M Elwenspoek, ... Nano Letters 2 (9), 1031-1032, 2002 | 118 | 2002 |
Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels M Dijkstra, MJ de Boer, JW Berenschot, TSJ Lammerink, RJ Wiegerink, ... Sensors and Actuators A: Physical 143 (1), 1-6, 2008 | 114 | 2008 |
Mask materials for powder blasting H Wensink, HV Jansen, JW Berenschot, MC Elwenspoek Journal of micromechanics and microengineering 10 (2), 175, 2000 | 94 | 2000 |
Micromachined fountain pen for atomic force microscope-based nanopatterning S Deladi, NR Tas, JW Berenschot, GJM Krijnen, MJ de Boer, JH De Boer, ... Applied physics letters 85 (22), 5361-5363, 2004 | 93 | 2004 |
High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through GJ Burger, EJT Smulders, JW Berenschot, TSJ Lammerink, JHJ Fluitman, ... Sensors and Actuators A: Physical 54 (1-3), 669-673, 1996 | 87 | 1996 |
Etching methodologies in< 111>-oriented silicon wafers RE Oosterbroek, JW Berenschot, HV Jansen, AJ Nijdam, G Pandraud, ... Journal of microelectromechanical systems 9 (3), 390-398, 2000 | 78 | 2000 |
Nanofluidic bubble pump using surface tension directed gas injection NR Tas, JW Berenschot, TSJ Lammerink, M Elwenspoek, A van den Berg Analytical chemistry 74 (9), 2224-2227, 2002 | 76 | 2002 |
Spatial decoupling of light absorption and catalytic activity of Ni–Mo-loaded high-aspect-ratio silicon microwire photocathodes W Vijselaar, P Westerik, J Veerbeek, RM Tiggelaar, E Berenschot, NR Tas, ... Nature Energy 3 (3), 185-192, 2018 | 72 | 2018 |
Nanometer arrays of functional light harvesting antenna complexes by nanoimprint lithography and host− guest interactions M Escalante, Y Zhao, MJW Ludden, R Vermeij, JD Olsen, E Berenschot, ... Journal of the American Chemical Society 130 (28), 8892-8893, 2008 | 71 | 2008 |
Advancements in technology and design of biomimetic flow-sensor arrays CM Bruinink, RK Jaganatharaja, MJ de Boer, E Berenschot, ML Kolster, ... 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009 | 70 | 2009 |
Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon EJW Berenschot, HV Jansen, NR Tas Journal of micromechanics and microengineering 23 (5), 055024, 2013 | 69 | 2013 |