MESA+ Institute for Nanotechnology, University of Twente
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Silicon micromachined hollow microneedles for transdermal liquid transport
HJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ...
Journal of Microelectromechanical systems 12 (6), 855-862, 2003
Silicon nitride nanosieve membrane
HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ...
Nano letters 4 (2), 283-287, 2004
Microneedle structure and production method therefor
Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers
US Patent 6,533,949, 2003
Micromachining of buried micro channels in silicon
MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of microelectromechanical systems 9 (1), 94-103, 2000
Capillarity induced negative pressure of water plugs in nanochannels
NR Tas, P Mela, T Kramer, JW Berenschot, A van den Berg
Nano Letters 3 (11), 1537-1540, 2003
Resistless patterning of sub-micron structures by evaporation through nanostencils
J Brugger, JW Berenschot, S Kuiper, W Nijdam, B Otter, M Elwenspoek
Microelectronic engineering 53 (1-4), 403-405, 2000
High resolution powder blast micromachining
H Wensink, JW Berenschot, HV Jansen, MC Elwenspoek
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000
A micromachined pressure/flow-sensor
RE Oosterbroek, TSJ Lammerink, JW Berenschot, GJM Krijnen, ...
Sensors and Actuators A: Physical 77 (3), 167-177, 1999
Wet anisotropic etching for fluidic 1D nanochannels
J Haneveld, H Jansen, E Berenschot, N Tas, M Elwenspoek
Journal of micromechanics and microengineering 13 (4), S62, 2003
2D-confined nanochannels fabricated by conventional micromachining
NR Tas, JW Berenschot, P Mela, HV Jansen, M Elwenspoek, ...
Nano Letters 2 (9), 1031-1032, 2002
Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels
M Dijkstra, MJ de Boer, JW Berenschot, TSJ Lammerink, RJ Wiegerink, ...
Sensors and Actuators A: Physical 143 (1), 1-6, 2008
Micromachined fountain pen for atomic force microscope-based nanopatterning
S Deladi, NR Tas, JW Berenschot, GJM Krijnen, MJ de Boer, JH De Boer, ...
Applied physics letters 85 (22), 5361-5363, 2004
Mask materials for powder blasting
H Wensink, HV Jansen, JW Berenschot, MC Elwenspoek
Journal of micromechanics and microengineering 10 (2), 175, 2000
High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through
GJ Burger, EJT Smulders, JW Berenschot, TSJ Lammerink, JHJ Fluitman, ...
Sensors and Actuators A: Physical 54 (1-3), 669-673, 1996
Nanofluidic bubble pump using surface tension directed gas injection
NR Tas, JW Berenschot, TSJ Lammerink, M Elwenspoek, A van den Berg
Analytical chemistry 74 (9), 2224-2227, 2002
Etching methodologies in< 111>-oriented silicon wafers
RE Oosterbroek, JW Berenschot, HV Jansen, AJ Nijdam, G Pandraud, ...
Journal of microelectromechanical systems 9 (3), 390-398, 2000
Nanometer arrays of functional light harvesting antenna complexes by nanoimprint lithography and host− guest interactions
M Escalante, Y Zhao, MJW Ludden, R Vermeij, JD Olsen, E Berenschot, ...
Journal of the American Chemical Society 130 (28), 8892-8893, 2008
Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
C Rusu, R van't Oever, MJ de Boer, HV Jansen, JW Berenschot, ...
Journal of microelectromechanical systems 10 (2), 238-246, 2001
Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon
EJW Berenschot, HV Jansen, NR Tas
Journal of micromechanics and microengineering 23 (5), 055024, 2013
Advancements in technology and design of biomimetic flow-sensor arrays
CM Bruinink, RK Jaganatharaja, MJ de Boer, E Berenschot, ML Kolster, ...
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009
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