Moving mask UV lithography for three-dimensional structuring Y Hirai, Y Inamoto, K Sugano, T Tsuchiya, O Tabata
Journal of Micromechanics and Microengineering 17 (2), 199, 2006
94 2006 Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system K Sugano, Y Uchida, O Ichihashi, H Yamada, T Tsuchiya, O Tabata
Microfluidics and nanofluidics 9, 1165-1174, 2010
58 2010 Reduction of surface roughness and aperture size effect for etching of Si with XeF2 K Sugano, O Tabata
Journal of Micromechanics and Microengineering 12 (6), 911, 2002
48 2002 Tensile and tensile-mode fatigue testing of microscale specimens in constant humidity environment T Tsuchiya, Y Yamaji, K Sugano, O Tabata
Experimental Mechanics 50, 509-516, 2010
37 2010 Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to T Tsuchiya, Y Ura, K Sugano, O Tabata
Journal of microelectromechanical systems 21 (3), 523-529, 2012
36 2012 Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip H Yagyu, K Sugano, S Hayashi, O Tabata
Journal of Micromechanics and Microengineering 15 (6), 1236, 2005
36 2005 Micromachined tactile sensor for soft-tissue compliance detection AMRF El Bab, K Sugano, T Tsuchiya, O Tabata, MEH Eltaib, MM Sallam
Journal of Microelectromechanical Systems 21 (3), 635-645, 2012
35 2012 A differential capacitive three-axis SOI accelerometer using vertical comb electrodes H Hamaguchi, K Sugano, T Tsuchiya, O Tabata
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007
35 2007 Design and simulation of a tactile sensor for soft-tissue compliance detection AMRF El Bab, T Tamura, K Sugano, T Tsuchiya, O Tabata, MEH Eltaib, ...
IEEJ Transactions on Sensors and Micromachines 128 (5), 186-192, 2008
27 2008 Fabrication of gold nanoparticle pattern using combination of self-assembly and two-step transfer K Sugano, T Ozaki, T Tsuchiya, O Tabata
Sensors and Materials 23 (5), 263-275, 2011
26 2011 Versatile method of submicroparticle pattern formation using self-assembly and two-step transfer T Ozaki, K Sugano, T Tsuchiya, O Tabata
Journal of microelectromechanical systems 16 (3), 746-752, 2007
25 2007 Embedded microstructure fabrication using developer-permeability of semi-cross-linked negative resist Y Hirai, K Sugano, T Tsuchiya, O Tabata
Journal of microelectromechanical systems 19 (5), 1058-1069, 2010
22 2010 A three-dimensional microstructuring technique exploiting the positive photoresist property Y Hirai, K Sugano, T Tsuchiya, O Tabata
Journal of Micromechanics and Microengineering 20 (6), 065005, 2010
21 2010 Surface-enhanced Raman spectroscopy using linearly arranged gold nanoparticles embedded in nanochannels K Sugano, K Suekuni, T Takeshita, K Aiba, Y Isono
Japanese Journal of Applied Physics 54 (6S1), 06FL03, 2015
20 2015 Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics H Yagyu, Y Hirai, A Uesugi, Y Makino, K Sugano, T Tsuchiya, O Tabata
Polymer 53 (21), 4834-4842, 2012
20 2012 Mechanical calibration of MEMS springs with sub-micro-Newton force resolution K Miyamoto, T Jomori, K Sugano, O Tabata, T Tsuchiya
Sensors and Actuators A: Physical 143 (1), 136-142, 2008
20 2008 Single-molecule surface-enhanced Raman spectroscopy of 4, 4′-bipyridine on a prefabricated substrate with directionally arrayed gold nanoparticle dimers K Sugano, K Aiba, K Ikegami, Y Isono
Japanese Journal of Applied Physics 56 (6S1), 06GK01, 2017
18 2017 Design and fabrication of a differential capacitive three‐axis SOI accelerometer using vertical comb electrodes T Tsuchiya, H Hamaguchi, K Sugano, O Tabata
IEEJ Transactions on electrical and electronic engineering 4 (3), 345-351, 2009
17 2009 Sequential and selective self-assembly of micro components by DNA grafted polymer T Tanemura, G Lopez, R Sato, K Sugano, T Tsuchiya, O Tabata, M Fujita, ...
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009
15 2009 Manipulation system for nano/micro components integration via transportation and self-assembly Y Higuchi, T Kusakabe, T Tanemura, K Sugano, T Tsuchiya, O Tabata
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems …, 2008
15 2008 