Francesc Perez-Murano
Francesc Perez-Murano
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Increasing the elastic modulus of graphene by controlled defect creation
G López-Polín, C Gómez-Navarro, V Parente, F Guinea, MI Katsnelson, ...
Nature Physics 11 (1), 26-31, 2015
Mechanical detection of carbon nanotube resonator vibrations
D Garcia-Sanchez, A San Paulo, MJ Esplandiu, F Perez-Murano, L Forró, ...
Physical review letters 99 (8), 085501, 2007
Local oxidation of silicon surfaces by dynamic force microscopy: Nanofabrication and water bridge formation
R Garcıa, M Calleja, F Pérez-Murano
Applied Physics Letters 72 (18), 2295-2297, 1998
Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection
G Abadal, ZJ Davis, B Helbo, X Borrise, R Ruiz, A Boisen, F Campabadal, ...
Nanotechnology 12 (2), 100, 2001
STM-induced hydrogen desorption via a hole resonance
K Stokbro, C Thirstrup, M Sakurai, U Quaade, BYK Hu, F Perez-Murano, ...
Physical review letters 80 (12), 2618, 1998
Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications
N Kacem, J Arcamone, F Perez-Murano, S Hentz
Journal of Micromechanics and Microengineering 20 (4), 045023, 2010
Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range
J Verd, A Uranga, G Abadal, JL Teva, F Torres, J Lopez, F Perez-Murano, ...
IEEE electron device letters 29 (2), 146-148, 2008
Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry
E Forsen, G Abadal, S Ghatnekar-Nilsson, J Teva, J Verd, R Sandberg, ...
Applied Physics Letters 87 (4), 2005
Predictive model for scanned probe oxidation kinetics
JA Dagata, F Perez-Murano, G Abadal, K Morimoto, T Inoue, J Itoh, ...
Applied Physics Letters 76 (19), 2710-2712, 2000
Anisotropic growth of long isolated graphene ribbons on the C face of graphite-capped -SiC
N Camara, JR Huntzinger, G Rius, A Tiberj, N Mestres, F Pérez-Murano, ...
Physical Review B—Condensed Matter and Materials Physics 80 (12), 125410, 2009
Nanometer‐scale oxidation of Si (100) surfaces by tapping mode atomic force microscopy
F Pérez‐Murano, G Abadal, N Barniol, X Aymerich, J Servat, P Gorostiza, ...
Journal of applied physics 78 (11), 6797-6801, 1995
Current, charge, and capacitance during scanning probe oxidation of silicon. I. Maximum charge density and lateral diffusion
JA Dagata, F Perez-Murano, C Martin, H Kuramochi, H Yokoyama
Journal of applied physics 96 (4), 2386-2392, 2004
AFM lithography of aluminum for fabrication of nanomechanical systems
ZJ Davis, G Abadal, O Hansen, X Borise, N Barniol, F Perez-Murano, ...
Ultramicroscopy 97 (1-4), 467-472, 2003
Voltage modulation scanned probe oxidation
F Pérez-Murano, K Birkelund, K Morimoto, JA Dagata
Applied physics letters 75 (2), 199-201, 1999
Nanolithography on thin layers of PMMA using atomic force microscopy
C Martín, G Rius, X Borrisé, F Pérez-Murano
Nanotechnology 16 (8), 1016, 2005
Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit
J Verd, G Abadal, J Teva, MV Gaudó, A Uranga, X Borrisé, F Campabadal, ...
Journal of microelectromechanical systems 14 (3), 508-519, 2005
Nanometre-scale oxidation of silicon surfaces by dynamic force microscopy: reproducibility, kinetics and nanofabrication
M Calleja, J Anguita, R Garcia, K Birkelund, F Perez-Murano, JA Dagata
Nanotechnology 10 (1), 34, 1999
Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications
J Verd, A Uranga, J Teva, JL Lopez, F Torres, J Esteve, G Abadal, ...
IEEE Electron Device Letters 27 (6), 495-497, 2006
Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions
J Verd, A Uranga, G Abadal, J Teva, F Torres, F Pérez-Murano, ...
Applied physics letters 91 (1), 2007
Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS
J Arcamone, MAF Van Den Boogaart, F Serra-Graells, J Fraxedas, ...
Nanotechnology 19 (30), 305302, 2008
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