M.J. de Boer (Meint)
M.J. de Boer (Meint)
Mesa+ Institute for Nanotechnology - University of Twente
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The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
H Jansen, M de Boer, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 5 (2), 115, 1995
6421995
A survey on the reactive ion etching of silicon in microtechnology
H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman
Journal of micromechanics and microengineering 6 (1), 14, 1996
5291996
Silicon micromachined hollow microneedles for transdermal liquid transport
HJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ...
Journal of Microelectromechanical systems 12 (6), 855-862, 2003
4852003
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ...
Journal of microelectromechanical systems 11 (4), 385-401, 2002
2912002
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as …
HV Jansen, MJ de Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek
Journal of micromechanics and microengineering 19 (3), 033001, 2009
2892009
Micromachining of buried micro channels in silicon
MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of microelectromechanical systems 9 (1), 94-103, 2000
2652000
Microneedle structure and production method therefor
Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers
US Patent 6,533,949, 2003
2592003
Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures
R Legtenberg, H Jansen, M De Boer, M Elwenspoek
Journal of the electrochemical society 142 (6), 2020, 1995
2261995
BSM 7: RIE lag in high aspect ratio trench etching of silicon
H Jansen, M de Boer, R Wiegerink, N Tas, E Smulders, C Neagu, ...
Microelectronic Engineering 35 (1-4), 45-50, 1997
1571997
The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches
H Jansen, M de Boer, J Burger, R Legtenberg, M Elwenspoek
Microelectronic engineering 27 (1-4), 475-480, 1995
1281995
Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels
M Dijkstra, MJ de Boer, JW Berenschot, TSJ Lammerink, RJ Wiegerink, ...
Sensors and Actuators A: Physical 143 (1), 1-6, 2008
1142008
Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk …
ET Den Braber, HV Jansen, MJ de Boer, HJE Croes, M Elwenspoek, ...
Journal of biomedical materials research 40 (3), 425-433, 1998
1061998
Micromachined fountain pen for atomic force microscope-based nanopatterning
S Deladi, NR Tas, JW Berenschot, GJM Krijnen, MJ de Boer, JH De Boer, ...
Applied physics letters 85 (22), 5361-5363, 2004
932004
Capillary force lithography: fabrication of functional polymer templates as versatile tools for nanolithography
CM Bruinink, M Péter, PA Maury, M De Boer, L Kuipers, J Huskens, ...
Advanced functional materials 16 (12), 1555-1565, 2006
912006
Carrier transport in mesoscopic silicon-coupled superconducting junctions
WM Van Huffelen, TM Klapwijk, DR Heslinga, MJ De Boer, ...
Physical Review B 47 (9), 5170, 1993
901993
The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source
H Jansen, M De Boer, H Wensink, B Kloeck, M Elwenspoek
Microelectronics Journal 32 (9), 769-777, 2001
862001
Advancements in technology and design of biomimetic flow-sensor arrays
CM Bruinink, RK Jaganatharaja, MJ de Boer, E Berenschot, ML Kolster, ...
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009
702009
Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
C Rusu, R van't Oever, MJ de Boer, HV Jansen, JW Berenschot, ...
Journal of microelectromechanical systems 10 (2), 238-246, 2001
692001
The black silicon method. VI. High aspect ratio trench etching for MEMS applications
H Jansen, M de Boer, M Elwenspoek
Proceedings of Ninth International Workshop on Micro Electromechanical …, 1996
641996
Microneedle structure and production method therefor
Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers
US Patent 7,648,484, 2010
602010
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