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Sherif Sedky
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Characterization and optimization of infrared poly SiGe bolometers
S Sedky, P Fiorini, K Baert, L Hermans, R Mertens
IEEE transactions on Electron Devices 46 (4), 675-682, 1999
2251999
Thermoelectric MEMS generators as a power supply for a body area network
V Leonov, P Fiorini, S Sedky, T Torfs, C Van Hoof
The 13th International Conference on Solid-State Sensors, Actuators and …, 2005
1962005
Experimental determination of the maximum post-process annealing temperature for standard CMOS wafers
S Sedky, A Witvrouw, H Bender, K Baert
IEEE transactions on Electron Devices 48 (2), 377-385, 2001
1862001
Silicon germanium mask for deep silicon etching
M Serry, A Rubin, M Refaat, S Sedky, M Abdo
US Patent 8,791,021, 2014
1822014
Nonlinear dynamics of spring softening and hardening in folded-MEMS comb drive resonators
AM Elshurafa, K Khirallah, HH Tawfik, A Emira, AKSA Aziz, SM Sedky
Journal of Microelectromechanical Systems 20 (4), 943-958, 2011
1492011
Method of fabrication of an infrared radiation detector and infrared detector device
P Fiorini, S Sedky, M Caymax, C Baert
US Patent 6,194,722, 2001
1292001
IR bolometers made of polycrystalline silicon germanium
S Sedky, P Fiorini, M Caymax, A Verbist, C Baert
Sensors and Actuators A: Physical 66 (1-3), 193-199, 1998
1281998
Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
S Sedky, P Fiorini, M Caymax, S Loreti, K Baert, L Hermans, R Mertens
Journal of microelectromechanical systems 7 (4), 365-372, 1998
821998
Method for depositing polycrystalline sige suitable for micromachining and devices obtained thereof
K Baert, M Caymax, C Rusu, S Sedky, A Witvrouw
US Patent 7,176,111, 2007
772007
Poly SiGe, a promising material for MEMS monolithic integration with the driving electronics
S Sedky, A Witvrouw, K Baert
Sensors and Actuators A: Physical 97, 503-511, 2002
662002
Characterization of bolometers based on polycrystalline silicon germanium alloys
S Sedky, P Fiorini, M Caymax, C Baert, L Hermans, R Mertens
IEEE Electron Device Letters 19 (10), 376-378, 1998
501998
Poly-SiGe, a superb material for MEMS
A Witvrouw, M Gromova, A Mehta, S Sedky, P De Moor, K Baert, ...
MRS Online Proceedings Library (OPL) 782, A2. 1, 2003
492003
Generation of approximate focus-wave-mode pulses from wide-band dynamic Gaussian apertures
AM Shaarawi, IM Besieris, RW Ziolkowski, SM Sedky
JOSA A 12 (9), 1954-1964, 1995
491995
Micromachined on-chip dielectric resonator antenna operating at 60 GHz
MO Sallam, M Serry, S Sedky, A Shamim, W De Raedt, ...
IEEE Transactions on Antennas and Propagation 63 (8), 3410-3416, 2015
482015
Pulsed-laser annealing, a low-thermal-budget technique for eliminating stress gradient in poly-SiGe MEMS structures
S Sedky, RT Howe, TJ King
Journal of Microelectromechanical Systems 13 (4), 669-675, 2004
482004
New low-stress PECVD poly-SiGe layers for MEMS
C Rusu, S Sedky, B Parmentier, A Verbist, O Richard, B Brijs, L Geenen, ...
Journal of microelectromechanical systems 12 (6), 816-825, 2003
472003
Recent progress in modularly integrated MEMS technologies
TJ King, RT Howe, S Sedky, G Liu, BCY Lin, M Wasilik, C Duenn
Digest. International Electron Devices Meeting,, 199-202, 2002
432002
Why CMOS-integrated transducers? A review
A Witvrouw, F Van Steenkiste, D Maes, L Haspeslagh, P Van Gerwen, ...
Microsystem Technologies 6, 192-199, 2000
422000
Post-processing techniques for integrated MEMS
S Sedky
Artech, 2005
372005
MEMS mass-spring-damper systems using an out-of-plane suspension scheme
AKSA Aziz, AH Sharaf, MY Serry, SS Sedky
US Patent 8,640,541, 2014
352014
El sistema no puede realizar la operación en estos momentos. Inténtalo de nuevo más tarde.
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