Terunobu Akiyama
Terunobu Akiyama
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Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS
T Akiyama, D Collard, H Fujita
Journal of Microelectromechanical systems 6 (1), 10-17, 1997
2761997
Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS
T Akiyama, D Collard, H Fujita
Journal of Microelectromechanical systems 6 (1), 10-17, 1997
2761997
Controlled stepwise motion in polysilicon microstructures
T Akiyama, K Shono
Journal of Microelectromechanical Systems 2 (3), 106-110, 1993
2421993
Nanomechanical membrane-type surface stress sensor
G Yoshikawa, T Akiyama, S Gautsch, P Vettiger, H Rohrer
Nano letters 11 (3), 1044-1048, 2011
1372011
A quantitative analysis of scratch drive actuator using buckling motion
T Akiyama, H Fujita
IEEE Proc. Int. Conf. Micro Electro Mechanical Systems, 310-315, 1995
891995
Atomic force bio-analytics
P Frederix, T Akiyama, U Staufer, C Gerber, D Fotiadis, DJ Müller, A Engel
Current opinion in chemical biology 7 (5), 641-647, 2003
802003
Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy
T Akiyama, U Staufer, NF De Rooij, P Frederix, A Engel
Review of scientific instruments 74 (1), 112-117, 2003
732003
Nanoscale dispensing of liquids through cantilevered probes
A Meister, S Jeney, M Liley, T Akiyama, U Staufer, NF De Rooij, ...
Microelectronic engineering 67, 644-650, 2003
682003
Microactuated self-assembling of 3D polysilicon structures with reshaping technology
Y Fukuta, D Collard, T Akiyama, EH Yang, H Fujita
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro …, 1997
681997
Integrated atomic force microscopy array probe with metal–oxide–semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal …
T Akiyama, U Staufer, NF De Rooij, D Lange, C Hagleitner, O Brand, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
672000
Conductive supports for combined AFM–SECM on biological membranes
PLTM Frederix, PD Bosshart, T Akiyama, M Chami, MR Gullo, ...
Nanotechnology 19 (38), 384004, 2008
662008
Assessment of insulated conductive cantilevers for biology and electrochemistry
PLTM Frederix, MR Gullo, T Akiyama, A Tonin, NF De Rooij, U Staufer, ...
Nanotechnology 16 (8), 997, 2005
662005
Characterization of microfabricated probes for combined atomic force and high-resolution scanning electrochemical microscopy
MR Gullo, PLTM Frederix, T Akiyama, A Engel, NF deRooij, U Staufer
Analytical chemistry 78 (15), 5436-5442, 2006
652006
Two dimensional array of piezoresistive nanomechanical membrane-type surface stress sensor (MSS) with improved sensitivity
G Yoshikawa, T Akiyama, F Loizeau, K Shiba, S Gautsch, T Nakayama, ...
Sensors 12 (11), 15873-15887, 2012
632012
Sub-ppm detection of vapors using piezoresistive microcantilever array sensors
G Yoshikawa, HP Lang, T Akiyama, L Aeschimann, U Staufer, P Vettiger, ...
Nanotechnology 20 (1), 015501, 2008
582008
Scanning probe arrays for life sciences and nanobiology applications
L Aeschimann, A Meister, T Akiyama, BW Chui, P Niedermann, ...
Microelectronic Engineering 83 (4-9), 1698-1701, 2006
582006
Scanning probe arrays for life sciences and nanobiology applications
L Aeschimann, A Meister, T Akiyama, BW Chui, P Niedermann, ...
Microelectronic Engineering 83 (4-9), 1698-1701, 2006
582006
Scanning probe arrays for life sciences and nanobiology applications
L Aeschimann, A Meister, T Akiyama, BW Chui, P Niedermann, ...
Microelectronic Engineering 83 (4-9), 1698-1701, 2006
582006
A quantitative analysis of scratch drive actuation for integrated X/Y motion system
P Langlet, D Collard, T Akiyama, H Fujita
Proceedings of International Solid State Sensors and Actuators Conference …, 1997
471997
Early studies and the history of development of the middle ear implant in Japan
J Suzuki
Advanced in Audiology 4, 1-14, 1988
431988
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