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Julien Arcamone
Julien Arcamone
ASM
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3-D sequential integration: A key enabling technology for heterogeneous co-integration of new function with CMOS
P Batude, T Ernst, J Arcamone, G Arndt, P Coudrain, PE Gaillardon
IEEE Journal on Emerging and Selected Topics in Circuits and Systems 2 (4 …, 2012
3342012
Gas sensors based on gravimetric detection—A review
S Fanget, S Hentz, P Puget, J Arcamone, M Matheron, ED Colinet, ...
Sensors and Actuators B: Chemical 160 (1), 804-821, 2011
2122011
Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications
N Kacem, J Arcamone, F Perez-Murano, S Hentz
Journal of Micromechanics and Microengineering 20 (4), 045023, 2010
1592010
M&NEMS: A new approach for ultra-low cost 3D inertial sensor
P Robert, V Nguyen, S Hentz, L Duraffourg, G Jourdan, J Arcamone, ...
SENSORS, 2009 IEEE, 963-966, 2009
932009
3D Sequential Integration: Application-driven technological achievements and guidelines
P Batude, L Brunet, C Fenouillet-Beranger, F Andrieu, JP Colinge, ...
2017 IEEE International Electron Devices Meeting (IEDM), 3.1. 1-3.1. 4, 2017
902017
Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS
J Arcamone, MAF Van Den Boogaart, F Serra-Graells, J Fraxedas, ...
Nanotechnology 19 (30), 305302, 2008
772008
Evaporation of femtoliter sessile droplets monitored with nanomechanical mass sensors
J Arcamone, E Dujardin, G Rius, F Perez-Murano, T Ondarcuhu
The Journal of Physical Chemistry B 111 (45), 13020-13027, 2007
762007
A compact and low-power CMOS circuit for fully integrated NEMS resonators
J Arcamone, B Misischi, F Serra-Graells, MAF van den Boogaart, ...
IEEE Transactions on Circuits and Systems II: Express Briefs 54 (5), 377-381, 2007
502007
Micro/nanomechanical resonators for distributed mass sensing with capacitive detection
J Arcamone, G Rius, G Abadal, J Teva, N Barniol, F Pérez-Murano
Microelectronic Engineering 83 (4-9), 1216-1220, 2006
472006
VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors
J Arcamone, A Niel, V Gouttenoire, M Petitjean, N David, R Barattin, ...
IEDM-2011 IEEE International Electron Devices Meeting, 669-672, 2011
422011
Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography
J Arcamone, M Sansa, J Verd, A Uranga, G Abadal, N Barniol, ...
Small 5 (2), 176-180, 2009
412009
Efficient capacitive transduction of high-frequency micromechanical resonators by intrinsic cancellation of parasitic feedthrough capacitances
J Arcamone, E Colinet, A Niel, E Ollier
Applied Physics Letters 97 (4), 2010
372010
Dynamic stencil lithography on full wafer scale
V Savu, MAF van den Boogaart, J Brugger, J Arcamone, M Sansa, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
312008
Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applications
E Ollier, C Dupré, G Arndt, J Arcamone, C Vizioz, L Duraffourg, E Sage, ...
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012
262012
Electron-and ion-beam lithography for the fabrication of nanomechanical devices integrated on CMOS circuits
G Rius, J Llobet, J Arcamone, X Borrisé, F Pérez-Murano
Microelectronic engineering 86 (4-6), 1046-1049, 2009
252009
Modeling and design of a fully integrated gas analyzer using a μGC and NEMS sensors
O Martin, V Gouttenoire, P Villard, J Arcamone, M Petitjean, G Billiot, ...
Sensors and Actuators B: Chemical 194, 220-228, 2014
222014
100 MHz oscillator based on a low polarization voltage capacitive Lamé-mode MEMS resonator
E Colinet, J Arcamone, A Niel, E Lorent, S Hentz, E Ollier
2010 IEEE International Frequency Control Symposium, 174-178, 2010
212010
Fully monolithic and ultra-compact NEMS-CMOS self-oscillator based-on single-crystal silicon resonators and low-cost CMOS circuitry
J Philippe, G Arndt, E Colinet, M Savoye, T Ernst, E Ollier, J Arcamone
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014
202014
16kbit 1T1R OxRAM arrays embedded in 28nm FDSOI technology demonstrating low BER, high endurance, and compatibility with core logic transistors
L Grenouillet, N Castellani, A Persico, V Meli, S Martin, O Billoint, ...
2021 IEEE International Memory Workshop (IMW), 1-4, 2021
192021
Nanoelectromechanical systems
L Duraffourg, J Arcamone
John Wiley & Sons, 2015
192015
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